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US 6,712,213 B2Granted
Wafer carrier door and latching mechanism withhourglass shaped key slot
AssigneeEntegris, Inc.
InventorShawn D. Eggum
Life of this patent
Estimating the term…
Abstract
A door for a wafer carrier having a latching mechanism with a rotatable actuating member. The rotatable actuating member is actuated from outside the wafer carrier using a key inserted into a key slot in the rotatable actuating member. The key slot is formed in an hourglass shape and comprised of abrasion resistant material to reduce generation of particulate contaminants.
Claims26
A wafer container comprising:
- an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, an open front, and a door to close the open front, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism, said latching mechanism comprising:
- at least a first latching arm;
- and
- a rotatable actuating member coupled to said latching arm, said rotatable actuating member having a substantially hourglass shaped key slot adapted to receive a key so that said rotatable actuating member is rotatable by imparting a rotary motion to said key when said key is received in said key slot.
4 more elements
A wafer container comprising:
- an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, an open front, and a door to close the open front, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism, said latching mechanism comprising:
- at least a first latching arm;
- and
- a rotatable actuating member coupled to said latching arm, said rotatable actuating member having a substantially hourglass shaped key slot, adapted to receive a key so that said rotatable actuating member is rotatable by imparting a rotary motion to said key when said key is received in said key slot, said substantially hourglass shaped key slot having a pair of opposing sides and a pair of opposing ends, each of said opposing pair of sides has a center portion disposed between two outwardly angled portions, and said center portion oriented substantially perpendicular to said opposing ends.
4 more elements
A wafer container comprising:
- an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, an open front, and a door to close the open front, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism, said latching mechanism comprising:
- at least a first latching arm;
- and
- a rotatable actuating member coupled to said latching arm, said rotatable actuating member having a substantially hourglass shaped key slot adapted to receive a key so that said rotatable actuating member is rotatable by imparting a rotary motion to said key when said key is received in said key slot, said substantially hourglass shaped key slot having a pair of opposing sides, each of said pair of opposing sides having an inwardly directed convex shape.
4 more elements
A wafer container comprising:
- an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, an open front, and a door to close the open front, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism, said latching mechanism comprising:
- at least a first latching arm;
- and
- a rotatable actuating member coupled to said latching arm, said rotatable actuating member having a substantially hourglass shaped key slot adapted to receive a key so that said rotatable actuating member is rotatable by imparting a rotary motion to said key when said key is received in said key slot, said substantially hourglass shaped key slot having a pair of opposing sides, each of said pair of opposing sides having an inwardly directed anticlinal shape.
4 more elements
A wafer transport container comprising:
- an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, an open front, and a door to close the open front, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism, the latching mechanism comprising:
- at least a first latching arm;
- and
- a rotatable cam member coupled with the latching arm, the cam member having a key slot adapted to receive a key so that said rotatable cam member is rotatable by imparting a rotary motion to said key when said key is received in said key slot, the key slot having a pair of opposing ends, said key slot further having a narrowed portion intermediate of the ends.
4 more elements
A wafer container comprising:
- an enclosure portion having at least a top, a bottom, a pair of opposing sides, a back, an open front, and a door to close the open front, said door comprising:
- a door chassis;
- and
- at least a first latching mechanism, said latching mechanism comprising:
- at least a first latching arm;
- a rotatable actuating member coupled to said latching arm, said rotatable actuating member having a key slot adapted to receive a key so that said rotatable actuating member is rotatable by imparting a rotary motion to said key when said key is received in said key slot;
- and
- means for reducing generation of particulates resulting from the insertion, rotation and removal of a key from said key slot.
5 more elements
Dependencies are inferred from the claim text.