Substrate holding apparatus and exposure apparatus including substrate holding apparatus
AssigneeNikon Corporation
InventorMakoto Kondo
Life of this patent
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Abstract
A substrate holding apparatus which holds a flat-like substrate comprises a base member and a plurality of projecting support members disposed on the base member such that the supporting members are arranged like a triangular lattice and distal end portions thereof are positioned on substantially the same plane. The substrate is to be placed on the plurality of support members.
Claims28
A substrate holding apparatus in an exposure apparatus which exposes a sensitive surface of a flat-like substrate with an exposure beam, which holds the substrate, comprising:
- a base member having a low thermal expansion coefficient;
- a protrusion formed on the base member and having a substantially same shape as an outside shape of the substrate;
- and
- a plurality of projecting support members disposed on said base member such that the projecting support members are arranged like a triangular lattice inside of the protrusion and distal end portions thereof are substantially positioned on a plane so as to respectively contact a different surface of the substrate from the sensitive surface, wherein
- the substrate is to be placed on said plurality of support members.
An exposure apparatus which illuminates a first object with an exposure beam, and exposes a sensitive surface of a second object with the exposure beam via the first object, comprising:
- a holder having a protrusion formed in a substantially same shape as an outside shape of the second object, and a plurality of projecting support members disposed like a triangular lattice inside of the protrusion such that distal end portions thereof positioned substantially on a plane so as to respectively contact a different surface of the substrate from the sensitive surface, the holder being formed of a material having a low thermal expansion coefficient, and
- a stage system including a movable body in which said holder is provided.
Dependencies are inferred from the claim text.