Fuse and fuse window structure

Abstract

A fuse structure. A first dielectric layer is formed on a substrate, a first conductive layer is formed on part of the first dielectric layer, a second dielectric layer is formed on part of the first dielectric layer and part of the first conductive layer, and a second conductive layer is formed on part of the second dielectric layer. A third dielectric layer is formed on part of the second conductive layer and part of the second dielectric layer, with an opening to expose part of the second conductive layer, to be defined as the laser spot position. A third conductive layer is formed on the third dielectric layer, with at least one conductive plug penetrating the second dielectric layer, to electrically connect the first conductive layer and the second conductive layer, to function as a fuse. Thus, in the present invention, the fuse structure of the third conductive layer can avoid damage to the adjacent fuse structure from the laser blow process.

Dependencies are inferred from the claim text.