Semiconductor device
AssigneeRenesas Technology Corp.
InventorAkie Yutani
Life of this patent
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Abstract
A semiconductor device which includes a capacitor wherein the capacitance of the capacitor can be prevented from being lowered even in the case that the capacitor is miniaturized. A core insulating film having the core of the capacitor formed above a semiconductor substrate, a capacitor lower electrode formed so as to cover side surfaces of this core insulating film, a capacitor dielectric film formed so as to cover the surface of this capacitor lower electrode and the upper surface of the core insulating film and a capacitor upper electrode formed so as to cover the surface of this core insulating film are provided so that the bottom surface of the core insulating film is positioned lower than the bottom surface of the capacitor lower electrode.
Claims5
A semiconductor device comprising:
- a core insulating film serving as a core of a capacitor formed on a semiconductor substrate;
- a capacitor lower electrode formed so as to cover a side surface of the core insulating film;
- a capacitor dielectric film formed on a surface of the capacitor lower electrode and directly on a top surface of said core insulating film;
- and
- a capacitor upper electrode formed so as to cover a surface of the capacitor dielectric film,
- wherein a bottom surface of said core insulating film is located below a bottom surface of said capacitor lower electrode.
Dependencies are inferred from the claim text.