Semiconductor structure and method for reducing charge damage

A method for reducing charge damage during plasma etch processing of a metal layer on a semiconductor wafer having an active region and a kerf regions, wherein the kerf region has a ground seal, the method comprising the steps of:

• forming structures in the kerf region during the plasma etch processing that are alignment marks, are for accumulating charge on the semiconductor wafer during the plasma etch processing, and are connected to the ground seal;
• connecting the structure electrically to device structures in the active region during the plasma etch processing;
• performing the plasma etch processing;
• and
• maintaining the connection during the plasma etch processing until the end of the plasma etch processing, wherein the connection is broken at the end of the plasma etch processing.