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US 6,686,131 B2Granted
Method of producing biocompatible structures and biocompatible microchip
AssigneeInfineon Technologies AG
InventorKlaus Elian
Life of this patent
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Abstract
A biocompatible structure is produced by first applying a chemically amplified photoresist to a substrate and structuring the photoresist. The photoresist comprises a polymer with anchor groups for linking a biocompatible compound. After the structuring of the resist, a solution of the biocompatible compound is applied so that the biocompatible compound is coordinated to the anchor groups of the polymer.
Claims12
A method of producing biocompatible structures, which comprises:
- providing a substrate;
- depositing a chemically amplified photoresist containing a polymer with anchor groups for linking a biocompatible compound on the substrate;
- structuring the photoresist to form a structured resist;
- and
- subsequently treating the structured resist with a biocompatible compound to coordinate the biocompatible compound to the anchor groups of the polymer.
2 more elements
A method of producing biocompatible structures, which comprises:
- providing a substrate;
- depositing a chemically amplified photoresist on the substrate, the photoresist containing:
- a polymer comprising acid-labile groups which, after an elimination thereof, liberates a polar group increasing a solubility of the polymer in aqueous alkaline developers, and anchor groups;
- a photo acid generator;
- and
- a solvent;
- drying the photoresist to form a photoresist film;
- exposing the photoresist film by section-by-section exposure to form an exposed photoresist film with exposed sections;
- heating the exposed photoresist film and eliminating the acid-labile groups from the polymer in the exposed sections;
- developing the exposed and heated photoresist film with an aqueous alkaline developer solution, to detach the exposed sections of the photoresist film from the substrate and to form a structured resist;
- subsequently applying a solution of a biocompatible compound to coordinate the biocompatible compound with the anchor groups of the polymer;
- and
- removing excess solution of the biocompatible compound.
10 more elements
Dependencies are inferred from the claim text.