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US 6,686,103 B2Granted
Fused silica pellicle
AssigneePhotronics, Inc.
InventorBen Eynon
Life of this patent
Estimating the term…
Abstract
A fused silica pellicle for use on photomasks having increased durability and improved transmission uniformity and birefringence properties. The pellicle may be secured to the photomask using an adhesive or a slide rail system, or may be held in place using a static charge.
Claims4
A method for manufacturing a semiconductor comprising the steps of:
- interposing a finished photomask between a semiconductor wafer and an energy source, wherein said finished photomask comprises:
- (a) a substantially transparent substrate;
- (b) a patterned area of mask material affixed to said substrate;
- (c) a frame affixed to said substrate surrounding substantially all of said patterned area of masking material;
- and
- (d) a silica pellicle affixed to said frame;
- generating energy in the energy source;
- transmitting said generated energy through said desired pattern formed in said finished photomask to said semiconductor wafer;
- and
- etching an image on said semiconductor wafer corresponding to said pattern formed in said finished photomask.
7 more elements
A method for manufacturing a semiconductor comprising the steps of:
- interposing a finished photomask between a semiconductor wafer and an energy source, wherein said finished photomask comprises:
- (a) a substantially transparent substrate;
- (b) a patterned area of mask material affixed to said substrate;
- (c) a frame affixed to said substrate surrounding substantially all of said patterned area of masking material;
- and
- (d) a silica pellicle affixed to said frame using a flexible retainer ring;
- generating energy in the energy source;
- transmitting said generated energy through said desired pattern formed in said finished photomask to said semiconductor wafer;
- and
- etching an image on said semiconductor wafer corresponding to said pattern formed in said finished photomask.
7 more elements
Dependencies are inferred from the claim text.