US 6,685,419 B2 · Mobile elevator transporter for semi-automatic wafer transfer

Abstract

A portable assembly allows semiconductor wafer boats to be transported safely from one semiconductor processing device to another semiconductor processing device at low cost using a small amount of the fabrication area without the need for complicated automated systems. The portable assembly includes two hollow bodies, of which one body may be elevated electromechanically to the height of a cantilever oven opening. The elevation may be conducted manually or automatically. The upper body of the assembly contains a rotating drum which further includes four segmented cylinders, which store and queue the wafer boats. The lower body contains a safety shoe locking apparatus which allows the elevator mechanism to be activated only when the assembly is docked in the appropriate location. The assembly also contains storage areas for wafers in progress. The assembly is moved manually on a set of wheels and may be rotated about its axis.

Claims27

Dependent claims

A device for assisting in the manufacture of a semiconductor wafer, comprised of:

means for loading and storing a set of one or more semiconductor wafer containers from any semiconductor processing device;
means for queuing said set of one of more semiconductor wafer containers including a semi-cylindrical drum and means for rotating said semi-cylindrical drum
means for transporting said device;
means for elevating said set of one of or more semiconductor wafer containers to a first height;
means for setting said first height at a level of an opening of a semiconductor processing device;
wherein all of the above means are contained within a single unit.

3 more elements

Dependencies are inferred from the claim text.

Mobile elevator transporter for semi-automatic wafer transfer

Life of this patent

Mobile elevator transporter for semi-automatic wafer transfer

Life of this patent

Abstract

Claims27