Tuning method for a processing machine
AssigneeApplied Materials, Inc.
InventorEyal Duzy
Life of this patent
Estimating the term…
Abstract
A method for setting at least one selected parameter of a processing tool. The processing tool is utilized for processing articles in a production line. Initially, the selected parameter is set to an initial value and one such article is positioned for processing. The article is sequentially processed by the processing tool a certain number of times and corresponding processed data are obtained. The processed data are analyzed so as to determine whether or not the processed data satisfy predetermined result criteria. Upon detecting that the processed data do not satisfy the result criteria, the selected parameter is changed to a tuned value and the processing, obtaining the processed data and analyzing thereof, are repeated as many times as required until the result criteria is satisfied.
Claims18
A method for setting at least one selected parameter of a processing tool that is utilized for processing articles in a production line, comprising:
- a) determining an initial value for said at least one selected parameter;
- b) processing an article by the processing tool and generating processed data indicative of features of the article, wherein said processing of the article and said generating of the processed data are repeated at a same resolution for a predetermined number of times;
- c) analyzing the processed data for the article by comparing each of the predetermined number of generated processed data to one another in order to determine how many of the predetermined number of generated processed data contain a same features, so as to determine whether or not the processed data satisfy a predetermined result criteria;
- d) upon determining that the processed data do not satisfy the result criteria, tuning said at least one selected parameter to a tuned value;
- and
- e) applying said steps (b), (c) and (d) as many times as required until said result criteria is satisfied.
Dependencies are inferred from the claim text.