Method for growing a solid type II-VI semiconductor material
AssigneeCommissariat a l'Energie Atomique
InventorBernard Pelliciari
Life of this patent
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Abstract
A growth method for a bulk II-VI type semiconductor material, including at least a first component and a second component. The method supplies in a crucible a charge including the components, with proportions of the components being such that the first component is used as a solvent. The crucible is then laced in an open tube reactor. The reactor temperature is then raised to obtain a temperature profile in the reactor ensuring the melting of the charge in the crucible and with the evaporation of the first component beginning, with the pressure inside the reactor being adjusted by the circulation of a gas so that the atmospheric pressure, with the partial pressure of the first component being greater than the partial pressure of the second component.
Claims12
A growth method for a bulk II-VI type semiconductor material, including at least a first component and a second component, the method comprising:
- supplying in a crucible a charge including said components, with the proportions of the components in the charge being such that the first component is used as a solvent;
- placing the crucible in an open tube reactor;
- raising the reactor temperature to obtain a temperature profile in the reactor ensuring the melting of the charge in the crucible and with the evaporation of the first component beginning, with the pressure inside the reactor being adjusted by the circulation of a gas so that the partial pressures of the components will be lower than the atmospheric pressure, with the partial pressure of the first component being greater than the partial pressure of the second component, the temperature profile being such that the melted charge is kept at a growth temperature equal to or slightly higher than its balance temperature and lower than the melting temperature of the desired material, with the temperature profile also being such that the crucible will show a cold point where the germination and the growth of the material takes place, with the reactor also having a cold point thereby allowing for the condensation of the solvent.
Dependencies are inferred from the claim text.