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US 6,673,521 B2Granted
Supercritical fluid(SCF) silylation process
Assigneelnternational Business Machines Corporation
InventorsWayne M. Moreau, Kenneth J. McCullough, David R. Medeiros, John P. Simons, Charles J. Taft
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Abstract
A process of silylation of object surfaces using a mixture of a silylation agent in admixture with an inert liquified gas, such as carbon dioxide.
Claims19
A method of silylation of workpiece surface, film, or fabric, comprising contacting the workpiece surface, film, or fabric, with a silylation agent and a supercritical liquid fluid.
A method for silylation of a chemical compounds, comprising contacting a mixture of a silylation agent selected from the group consisting of HMDS, Me3SiCl with Et3N, THF, or Li2S CH3CN;
- (Me3Si)2NH and Me3SiCl, Pyridine;
- Me3SiNEt2;
- CH3C(OSiMe3)═NSiMe3;
- Me3SiCH2CO2Et;
- Me3SiNHSO2OSiMe3 with CH2Cl2;
- Me3SiNHCO2SiMe3;
- Me═C(OMe)OSiMe3;
- Me3SiCH2CH═CH;
- (Me3 SiO)2 SO2;
- N,O-Bis(trimethylsilyl)trifluoroacetamide;
- N,N′-Bistrimethylsilylurea;
- Me3SiSEt;
- Isopropenyloxytrimethylsilane;
- Methyl 3-trimethylsiloxy-2-butenoate;
- N-methyl-N-trimethylsilylacetamide;
- trimethylsilyl cyanide;
- Me3SiOC(O)NMe3;
- trimethylsilylimidazole;
- trimethylsilyl trichloroacetate;
- 3-Trimethylysilyloxazolidinone;
- and trimethylysilyl trifluoromethanesulfonate, and a supercritical liquid fluid.
18 more elements
Dependencies are inferred from the claim text.