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US 6,673,161 B2Granted
Substrate handling end effector
AssigneeBrooks Automation, Inc.
InventorsTuan T. Ha, Hakan Elmali
Life of this patent
Estimating the term…
Abstract
A substrate handling end effector is provided. The substrate handling end effector has a vacuum chuck to support a semiconductor substrate thereon. A vacuum passage and a liquid passage are located in the vacuum chuck. The vacuum passage is adapted to be connected to a vacuum source and the liquid passage is adapted to be connected to a liquid source. The liquid passage is connected to the vacuum passage.
Claims20
A substrate handling end effector comprising:
- a vacuum chuck adapted to support a semiconductor substrate thereon;
- a vacuum passage located in the vacuum chuck;
- and
- a liquid passage located in the vacuum chuck;
- wherein the vacuum passage is adapted to be connected to a vacuum source and the liquid passage is adapted to be connected to a liquid source and, wherein the liquid passage is connected to the vacuum passage for selectably drawing liquid from the liquid source through the vacuum passage.
2 more elements
A semiconductor substrate transfer apparatus comprising:
- a drive;
- an arm connected to the drive;
- a vacuum source;
- a liquid source;
- and
- an end effector coupled to the arm and adapted to support a substrate, the end effector comprising:
- a substrate support comprising a vacuum passage connected to the vacuum source, and a liquid passage connected to the liquid source, said liquid passage connected to said vacuum passage for selectably drawing liquid from the liquid source through the vacuum passage.
4 more elements
A method of cleaning a vacuum passage in a substrate supporting end effector comprising the steps of:
- connecting a vacuum source to a vacuum passage of a substrate support of the end effector;
- connecting a source of liquid to a liquid passage of the substrate support;
- and
- connecting said liquid passage to said vacuum passage for selectably drawing liquid from the liquid source through the vacuum passage.
1 more element
Dependencies are inferred from the claim text.