Micromachined fluidic coupler and method of making the same

A method of fabricating a micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size comprising:

• masking a substrate from which a body of said micromachined coupler will be formed said masking forming a pattern to define a pyramidal structure in said substrate;
• anisotropically etching said masked substrate to form said pyramidal structure including a pit in said pyramidal structure;
• masking a surface of substrate opposing said pyramidal structure;
• and
• defining a prismatic hole through said substrate and communicating with said pit to provide a through hole through said substrate.
• where anisotropically etching said masked substrate to form said pyramidal structure forms a simple truncated structure.

A method of fabricating a micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size comprising:

• masking a substrate from which a body of said micromachined coupler will be formed, said masking forming a pattern to define a pyramidal structure in said substrate;
• anisotropically etching said masked substrate to form said pyramidal structure including a pit in said pyramidal structure;
• masking a surface of substrate opposing said pyramidal structure;
• defining a prismatic hole through said substrate and communicating with said pit to provide a through hole through said substrate;
• and
• disposing a capillary into said prismatic hole in a sealed relationship therewith.

A method of fabricating a micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size comprising:

• masking a substrate from which a body of said micromachined coupler will be formed, said masking forming a pattern to define a pyramidal structure in said substrate;
• anisotropically etching said masked substrate to form said pyramidal structure including a pit in said pyramidal structure;
• masking a surface of substrate opposing said pyramidal structure;
• and
• defining a prismatic hole through said substrate and communicating with said pit to provide a through hole through said substrate,
• where anisotropically etching said masked substrate to form said pyramidal structure forms a square truncated structure.

A method of fabricating a micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size comprising:

• masking a substrate from which a body of said micromachined coupler will be formed, said masking forming a pattern to define a pyramidal structure in said substrate;
• anisotropically etching said masked substrate to form said pyramidal structure including a pit in said pyramidal structure;
• masking a surface of substrate opposing said pyramidal structure;
• and
• defining a prismatic hole through said substrate and communicating with said pit to provide a through hole through said substrate,
• where anisotropically etching said masked substrate to form said pyramidal structure forms a triangular truncated structure.

A method of fabricating a micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size comprising:

• masking a substrate from which a body of said micromachined coupler will be formed, said masking forming a pattern to define a pyramidal structure in said substrate;
• anisotropically etching said masked substrate to form said pyramidal structure including a pit in said pyramidal structure;
• masking a surface of substrate opposing said pyramidal structure;
• and
• defining a prismatic hole through said substrate and communicating with said pit to provide a through hole through said substrate,
• where anisotropically etching said masked substrate to form said pyramidal structure forms a conical truncated structure.

A micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size comprising:

• a substrate;
• a cavity defined in said substrate defining said orifice;
• a micromachined body having a shape conforming said shape of said cavity;
• and
• a micromachined through hole defined through said body having a size conforming to said first size of said capillary, said capillary being disposed into said through hole so that said capillary of said first size is coupled to said orifice of said second size wherein said first and second sizes are not the same.