Shutter disk and blade alignment sensor

A physical vapor deposition processing chamber comprising:

• a chamber body having sidewalls and a bottom;
• a substrate support disposed in the chamber body;
• a slot formed in one of the sidewalls;
• a housing sealingly coupled to the chamber body and around the perimeter of the slot;
• at least a first window disposed in the housing;
• a shutter blade adapted to support a shutter disk, the shutter blade rotatable between a first position at least partially disposed in the housing and a second position within the chamber body proximate the substrate support;
• and
• a first sensor disposed proximate the housing and orientated to detect the presence of the shutter disk viewed through the first window when the blade is in the first position.

A physical vapor deposition processing chamber comprising:

• a chamber body having sidewalls and a bottom;
• a substrate support disposed in the chamber body;
• a slot formed in one of the sidewalls;
• a housing sealingly coupled to the chamber body and around the perimeter of the slot;
• at least a first window disposed in the housing;
• a shutter disk disposed in the chamber body, the shutter disk rotatable between a first position at least partially disposed in the housing and a second position within the chamber body proximate the substrate support;
• a first sensor disposed proximate the housing and orientated to detect the presence of the shutter disk viewed through the first window when the blade is in the first position;
• and
• a second sensor disposed radially outward from the first sensor relative to the substrate support, and orientated to detect the presence of the shutter disk viewed through the first window.