Wafer loading system positioning method and device

A wafer loading system positioning device, comprising:

• a loading system for docking on a positioning frame of a semiconductor production equipment, having a base at a lower part and a rear plate, said rear plate, for docking, connected with said positioning frame and positioned thereon, said rear plate having an upper part, with a connecting system being mounted between said upper part of said rear plate and said positioning frame for positioning said loading system on said positioning frame, said connecting device further comprising
• a holding seat on said upper part of said rear plate, having a lower side with a holding groove,
• a connecting seat on an upper part of a front side of said positioning frame, having a middle part from which a positioning element extends upward,
• an opening, cut through said rear plate at a location below said holding seat, allowing said connecting seat to be passed through, so that said positioning element, put through from a rear side of said rear plate, appears at a front side of said rear plate at a location suitable to engage with said holding groove, and
• a horizontal adjusting device and a vertical adjusting device, respectively placed on said holding seat and said connecting seat for horizontal and vertical adjusting of a relative position of said holding seat with respect to said positioning element;
• and
• a lifting mechanism, located between said base and said positioning system and used to raise said loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.