Semiconductor component having double passivating layers formed of two passivating layers of different dielectric materials
AssigneeInfineon Technologies AG
InventorsJosef Willer, Paul-Werner Von Basse, Thomas Scheiter
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Abstract
A semiconductor component with passivation includes at least two double passivating layers, of which an uppermost is applied to a planar surface of a layer located therebelow. The double passivating layers include two layers of different dielectric materials, for example silicon oxide and silicon nitride. The respective thicknesses of the individual passivating layers can be adapted to dimensions of the structuring of the layer to which the passivation is applied. This produces a reliable passivation which is particularly suitable for capacitively measuring fingerprint sensors.
Claims4
A semiconductor component forming a capacitively measuring fingerprint sensor, comprising:
- a semiconductor body;
- a layer structured with interspaces, said layer carried by said semiconductor body, having a side facing away from said semiconductor body, and forming conductor surfaces of the capacitively measuring fingerprint sensor;
- a passivation covering said side of said structured layer facing away from said semiconductor body and filling said interspaces in said structured layer, said passivation including at least two double passivating layers applied one above another, and said at least two double passivating layers including a double passivating layer having a surface forming a bearing surface for a fingertip disposed furthest from said semiconductor body and a preceding double passivating layer having a planarized top side, said double passivating layer disposed furthest from said semiconductor having upper and lower plane boundary surfaces, said lower plane boundary surface forming a boundary surface for said preceding double passivating layer and said upper plane boundary surface forming a bearing surface for the fingertip;
- each of said double passivating layers formed of two passivating layers of different dielectric materials;
- and
- at least said double passivating layer disposed furthest from said semiconductor body applied with uniform thickness to said planarized top side of said preceding double passivating layer.
Dependencies are inferred from the claim text.