Liquid processing apparatus and method

A liquid processing apparatus for applying processing liquid on an object to be processed, comprising:

• a case;
• a holder for holding the object rotatably;
• a processing chamber surrounded by the case to accommodate the object and the holder therein;
• a liquid supplier for supplying processing liquid to the object in the processing chamber;
• and
• a case heat exchanger provided to the case,
• wherein the processing chamber has a first processing chamber and a second processing chamber surrounding the first processing chamber;
• the case having a first case surrounding the first processing chamber and a second case surrounding the second processing chamber;
• the first case and the second case being constructed so as to be movable relatively;
• and
• the case heat exchanger being provided, at least, to the first case.

A liquid processing method of applying a process on an object to be processed by supplying processing liquid to the object accommodated in a processing chamber surrounded by a case, the liquid processing method comprising:

• adjusting a temperature of a temperature-adjustment medium by a liquid temperature controller in a liquid supplier, while adjusting a temperature of the processing liquid by the liquid temperature controller in the liquid supplier;
• and
• making the temperature-adjustment medium adjusted in temperature flow to an outer surface of the case by the liquid supplier, to control temperature of the processing chamber;
• at the time when the processing liquid is supplied to the object accommodated in the processing chamber.

A liquid processing method of applying a process on an object to be processed by supplying processing liquid to the object accommodated in a processing chamber surrounded by a case, the liquid processing method comprising:

• adjusting a temperature of a temperature-adjustment medium by a liquid temperature controller in a liquid supplier, while adjusting a temperature of the processing liquid by the liquid temperature controller in the liquid supplier;
• making a temperature-adjustment medium adjusted in temperature flow into a case heat exchanger provided to the case, while supplying the processing liquid adjusted in temperature to the liquid supplier, thereby to control temperature of the processing chamber, at the time of a first process when the processing liquid is supplied to the object accommodated in the processing chamber;
• stopping to supply the processing liquid and stopping the flow of the temperature-adjustment medium in the case heat exchanger;
• and
• supplying the object with another processing liquid thereby to apply a second process on the object.

A liquid processing method of applying a process on an object to be processed by supplying processing liquid to the object accommodated in a processing chamber, the liquid processing method comprising:

• adjusting a temperature of a temperature-adjustment medium by a liquid temperature controller in a liquid supplier, while adjusting a temperature of the processing liquid by the liquid temperature controller in the liquid supplier;
• controlling temperature of the processing chamber by making the temperature-adjustment medium adjusted in temperature flow into a case heat exchanger provided to the case, at a first process to supply the processing liquid adjusted in a predetermined temperature to the object accommodated in the processing chamber;
• stopping the supply of the processing liquid and simultaneously stopping the control of temperature of the processing chamber;
• cooling an interior of the processing chamber adjusted in temperature;
• and
• supplying the object with another processing liquid thereby to apply a second process on the object.