Apparatus for substrate cleaning of liquid crystal display and method for substrate cleaning using it
AssigneeBoe Hydis Technology Co., Ltd.
InventorsMan Suk Kim, Jae Kyoung Ryou
Life of this patent
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Abstract
Disclosed is an apparatus for substrate cleaning of liquid crystal display capable of desirably controlling the exhaust pressure and a method for substrate cleaning using it. The disclosed comprises a spin dry cup having a rotation device for rotating substrate, an air absorber arranged on the external of the spin dry cup to absorb impurities exhausted from the rotating substrate with air, a trap for exhausting air and impurities absorbed from the air absorber to the external, an exhaust pressure control part arranged in the trap to control exhaust pressure of the trap, and a drain arranged in the trap to exhaust chemicals and water from the rotating substrate to the external.
Claims4
An apparatus for substrate cleaning of liquid crystal display having a spin dry unit performing cleaning and dry processes, wherein the spin dry unit comprise:
- a spin dry cup having a rotation device for rotating substrate;
- an air absorber arranged on the external of the spin dry cup to absorb impurities exhausted from the rotating substrate with air;
- a trap for exhausting air and impurities absorbed from the air absorber to the external;
- an exhaust pressure control part arranged in the trap to control exhaust pressure of the trap;
- and
- a drain arranged in the trap to exhaust chemicals and water from the rotating substrate to the external.
An air absorber arranged on the external of a spin dry cup to absorb impurities exhausted from a rotating substrate with air, comprising:
- a trap for exhausting air and impurities absorbed from the air absorber to the external;
- an exhaust pressure control part arranged in the trap to control exhaust pressure of the trap, wherein the exhaust pressure control part comprises a manual damper for controlling the open and close by hand operation and an auto damper for automatically controlling the open and close, set to open when the substrate is loaded on the rotation device and cleaning process is performed;
- and
- a drain arranged in the trap to exhaust chemicals and water from the rotating substrate to the external.
Dependencies are inferred from the claim text.