Method of measuring oscillatory semiconductor membranes and shielding for external excitations in the measurement
AssigneeLeica Microsystems Semiconductor GmbH
InventorsGerd Stach, Thomas Struck
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Abstract
The method enables optical measurements of an oscillatory, and particularly structured, membrane in an environment which is subjected to gas flows and/or acoustic excitations. A device for measuring the membrane is focused on the same. An optically transparent film is provided, and the film and the membrane are arranged in such a manner that the gas flows and/or the acoustic excitations reach the membrane only by passing through the film. The film enables a diminishing of the external air movements and thus oscillations of the membrane so that the membrane can be precisely measured.
Claims20
A membrane measurement method, which comprises:
- providing a semiconductor membrane in an environment subjecting the semiconductor membrane to oscillatory excitations selected from the group comprising gas flows and acoustic excitations;
- providing an optically transparent film and arranging the semiconductor membrane and the film such that the oscillatory excitations reach the semiconductor membrane substantially only through the film;
- and
- focusing a device, for optically measuring the membrane, onto the membrane and thereby measuring the membrane.
A membrane measurement method, which comprises:
- providing an oscillatory membrane in an environment with oscillatory excitations selected from the group comprising gas flows and acoustic excitations;
- placing the oscillatory membrane in a pellicle for one of damping and shielding the membrane against the oscillatory excitations;
- and
- focusing a device, for optically measuring the membrane, onto the membrane, and thereby measuring the membrane.
A membrane measurement method, which comprises:
- providing a semiconductor membrane in an environment subjecting the semiconductor membrane to oscillatory excitations selected from the group comprising gas flows and acoustic excitations;
- providing an optically transparent film and arranging the semiconductor membrane and the film such that the oscillatory excitations reach the semiconductor membrane substantially only through the film;
- and
- focusing a device, for optically measuring the membrane, onto the membrane and thereby measuring the membrane.
Dependencies are inferred from the claim text.