Scanning probe instrument
AssigneeSeiko Instruments Inc.
InventorsYukihiro Sato, Ryuichi Matsuzaki
Life of this patent
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Abstract
A scanning probe instrument which can calibrate measured values and permits accurate length measurements regardless of a magnification factor. A scan signal generator produces a fine movement signal that is amplified or attenuated by an attenuator. Magnification data items for various magnification modes are stored in a dimensional relation storing portion. A magnification selector portion reads data for setting either magnification corresponding to the present mode of operation of the scanning probe instrument specified by a mode signal from the dimensional relation storing portion and sends it to an attenuator. The attenuator amplifies or attenuates the scan signal at a magnification corresponding to the magnification data supplied via the magnification selector portion.
Claims8
A scanning probe instrument for bringing a probe into close proximity to a surface of a sample and causing relative scanning movement of the probe with respect to the sample in X- and Y-directions while finely moving the probe in a Z direction such that a gap between the probe and the sample is maintained at a constant value, the scanning probe instrument comprising:
- fine motion signal-generating means for generating a fine motion signal to move the probe finely in at least one of the X-, Y-, and Z-directions;
- an attenuator for amplifying or attenuating the fine motion signal and outputting the amplified or attenuated fine motion signal;
- fine driver means for finely driving the probe according to the output signal of the attenuator;
- and
- storing means for storing a known dimension and a result of a length measurement;
- wherein
- the attenuator amplifies or attenuates the fine motion signal according to a dimensional relation between the known dimension and the result of the length measurement stored in the storing means.
A scanning probe apparatus comprising:
- a probe;
- a scanning tube having one end fixedly mounted to an enclosure and a free end to which the probe is attached;
- scanning means for moving the probe into close proximity to a surface of a sample and bending the scanning tube to cause relative scanning movement of the probe with respect to the sample in two dimensions while finely moving the probe in a third dimension such that a gap between the probe and the sample is maintained at a desired value;
- rigidity-varying means for varying the rigidity of the scanning tube so that the scanning probe apparatus is operable in a wide mode in which the rigidity of the scanning tube is lowered so that scanning can be performed over a wide range and in a zoom mode in which the rigidity of the scanning tube is enhanced so that scanning can be performed over a narrow range;
- fine motion signal-generating means for generating a fine motion signal to move the probe finely in at least one of the three dimensions;
- an attenuator for amplifying or attenuating the fine motion signal and outputting the amplified or attenuated fine motion signal;
- fine driver means for finely driving the probe according to the output signal of the attenuator;
- and storing means for storing a known dimension and a result of a length measurement;
- wherein the attenuator amplifies or attenuates the fine motion signal according to a dimensional relationship between the known dimension and the result of the length measurement stored in the storing means.
A scanning probe instrument comprising:
- a probe;
- rough movement means for bringing the probe into close proximity to a surface of a sample;
- a scanning tube for causing relative scanning movement of the probe with respect to the sample in two directions while finely moving the probe in a third direction such that a gap between the probe and the sample is maintained at a desired value;
- a controller for producing a fine motion signal indicating desired movements of the probe in the three directions by the scanning tube;
- and an attenuator for amplifying or attenuating the fine motion signal according to a dimensional relationship between a known dimension and a result of a length measurement and outputting the amplified or attenuated fine motion signal to the scanning tube.
Dependencies are inferred from the claim text.