Photosensitive composition comprising a vinyl copolymer and an o-naphthoquinone diazide compound

A photosensitive composition comprising a vinyl polymer compound which is insoluble in water and soluble in an aqueous alkaline solution and o-naphthoquinonediazide compound, wherein said vinyl polymer compound is a copolymer comprising at least one monomer unit derived from monomer compound (A) and at least one monomer unit derived from monomer compound (B) described below and the content of monomer unit derived from (A) ranges from 10 to 35% by mole:

• (A) a compound having an alkaline-soluble group represented by the following general formula (I), (II) or (III),
• (wherein, X represents —O— or —NR3—;
• R1 represents —H or —CH3;
• R2 represents single bond or bivalent organic group;
• Y represents arylene group;
• Z represents —OH, —COOH, —SO2NHR4, —NHSO2R5, —CONHSO2R6, —SO2NHCOR7, —NHCONHSO2R8, —SO2NHCONHR9, —CONHSO2NHR10, —NHSO2NHCOR11, —SO2NHSO2R12, —COCH2COR13, —OCONHSO2R14, or SO2NHCOOR15;
• n is 0 or 1, but when R2 is single bond and Z is —OH, n is 1;
• m is an integer of 1 or higher;
• R3 is hydrogen atom or optionally substituted C1-12 alkyl group, C1-12 cycloalkyl group, C1-12 aryl group or C1-12 aralkyl group;
• R4, R9, and R10 each represents hydrogen atom or optionally substituted C1-12 alkyl group, C1-12 cycloalkyl group, C1-12 aryl group or C1-12 aralkyl group:
• R5, R6, R7, R8, R11, R12, R13, R14, and R15 each represents optionally substituted C1-12 alkyl group, C1-12 cycloalkyl group, C1-12 aryl group or C1-12 aralkyl group),
• [wherein, A represents hydrogen atom, halogen atom or alkyl group;
• B represents single bond, alkylene group, phenylene group, substituted alkylene group or substituted phenylene group;
• X1 represents
• X2 represents
• (wherein, R represents optionally substituted alkyl group, cycloalkyl group, phenyl group, or naphthyl group)],
• (wherein, E and E′ each represents hydrogen atom, halogen atom, alkyl group or phenyl group;
• F and F′ each separately represents single bond, alkylene group or substituted alkylene group;
• X3 and X4 each represents
• (B) (meth)acrylate having poly(oxyalkylene) chain.