Powder precursor delivery system for chemical vapor deposition
AssigneeThe Florida State University Research Foundation, Inc.
InventorsKlaus-Herman M. Dahmen, Ilya S. Tchouprakov
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Abstract
A precursor delivery system introduces a multicomponent solid precursor into an evaporator during chemical vapor deposition. The system uses a container having an open bottom with the precursor being placed into the container along with a plurality of beads that do not react with the precursor. The beads, coated with the precursor, exit the container by being transported within the groove of a roller that is rotatably disposed proximate the open bottom of the container and drop out of the groove and into the evaporator with the beads thereby introducing the precursor into the evaporator. A screen is disposed within the evaporator for capturing and retrieving the beads.
Claims25
A precursor delivery system comprising:
- a housing having an open first top and an open first bottom;
- a container having a second open top and a second open bottom and disposed within the housing;
- and
- a roller having a nonstick outer surface and a circumferential groove, the roller rotatably disposed within the housing and positioned such that a portion of the outer surface faces the second bottom of the container.
A method of delivering a precursor into an evaporating chamber comprising the steps of:
- providing a housing having an open first top and an open first bottom;
- providing a container having a second open top and a second open bottom and disposing the container within the housing;
- providing a roller having a nonstick outer surface and a circumferential groove, and rotatably disposing the roller within the housing and positioning the roller such that a portion of the outer surface faces the second bottom of the container;
- providing a precursor and placing the precursor into the container;
- providing a plurality of beads and placing the beads into the container such that the beads are coated with the precursor;
- and
- rotating the roller.
Dependencies are inferred from the claim text.