Single-substrate-processing apparatus for semiconductor process
AssigneeTokyo Electron Limited
InventorTakahiro Horiguchi
Life of this patent
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Abstract
A single-substrate-processing apparatus includes an airtight process chamber in which a ceramic worktable is supported by a ceramic pedestal. The bottom of the pedestal is provided with a flange, which is attached to the bottom of the process chamber by a flange holder. The flange holder has upper and lower frames sandwiching the flange therebetween. The flange holder is detachably fixed by fixing bolts to the bottom of the process chamber from outside the process chamber.
Claims23
A single-substrate-processing apparatus for performing a semiconductor process, comprising:
- an airtight process chamber configured to process a target substrate therein;
- a worktable having a mount face configured to support the target substrate within the process chamber;
- a hollow pedestal configured to support the worktable and having a flange at a bottom end;
- a flange holder having an overhang configured to cover the flange from above within the process chamber;
- and
- a fixing member configured to detachably fix the pedestal to a bottom of the process chamber by engaging with the flange holder from below and outside the bottom of the process chamber, the fixing member providing the overhang of the flange holder with a force to push the flange toward the bottom of the process chamber.
A single-substrate-processing apparatus for performing a semiconductor process, comprising:
- an airtight process chamber configured to process a target substrate therein;
- a worktable having a mount face configured to support the target substrate within the process chamber;
- a hollow pedestal configured to support the worktable and having a flange at a bottom end;
- a flange holder comprising an upper frame having an overhang configured to cover the flange from above within the process chamber, and a lower frame having a ring seat configured to cover the flange from below within the process chamber;
- a connecting member configured to connect the upper and lower frames to each other with the flange sandwiched between the overhang and the seat;
- and
- a fixing member configured to detachably fix the pedestal to a bottom of the process chamber by engaging with the lower frame from below and outside the bottom of the process chamber.
Dependencies are inferred from the claim text.