Inner tube for CVD apparatus
AssigneeKabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
InventorsMaki Hamaguchi, Takahiro Kobayashi
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Abstract
Disclosed herein is an inner tube for CVD apparatus which is made of glass-like carbon. This inner tube has good heat resistance and good corrosion resistance. It also has an inside surface for good adhesion with CVD film constituents. Therefore, it hardly contaminates silicon wafers during the production of semiconductors. The inner tube is characterized by a specific coefficient of thermal expansion, a specific surface roughness of its inside surface, a specific oxygen/carbon atomic ratio (O/C) of its inside surface, and a specific I(D)/I(G) ratio of its inside surface, where I(D) is a peak intensity representing the C—C bond of diamond-like structure and I(G) is a peak intensity representing the C—C bond of graphite-like structure.
Claims16
A conventional CVD chamber comprising an inner tube which is made of glass-like carbon, wherein the inner surface of said inner tube gives an oxygen/carbon atomic ratio (O/C) ranging from 0.04 to 0.4 measured by x-ray photoelectron spectroscopy.
A CVD chamber comprising an inner tube which is made of glass-like carbon, wherein said inner tube is selectively attached to said CVD chamber at a base of said inner tube, and wherein the inner surface of said inner tube gives an oxygen/carbon atomic ratio (O/C) ranging from 0.04 to 0.4 measured by x-ray photoelectron spectroscopy.
A conventional CVD chamber comprising an inner tube, wherein said inner tube comprises a carbon substrate with a film of glass-like carbon coated thereon, and wherein the inner surface of said inner tube gives an oxygen/carbon atomic ratio (O/C) ranging from 0.04 to 0.4 measured by x-ray photoelectron spectroscopy.
Dependencies are inferred from the claim text.