Apparatus and method for preventing droplets on wafers during solvent drying process
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorFeng Chia Hsu
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Abstract
An apparatus and a method for preventing solvent droplets from falling on wafers during a solvent drying process of a semiconductor wafer. The apparatus is constructed by a body having a cavity therein for holding a wafer, means for introducing a solvent vapor in the cavity, a plurality of condenser coils on an inside wall of the cavity, and a plurality of condensing plates attached to the plurality of condenser coils on a surface facing the wafer for condensing solvent vapor and flowing condensed solvent into a reservoir thus preventing solvent droplets from falling on the wafer surface.
Claims19
A solvent dryer equipped with condenser coils and drip-proof guards comprising:
- a cavity for holding a wafer therein;
- means for introducing a solvent vapor in said cavity;
- a plurality of condenser coils positioned on an inside wall of said cavity;
- and
- a plurality of condensing plates affixed to said plurality of condenser coils on a surface facing said wafer for condensing solvent vapor and flowing condensed solvent into a reservoir and preventing solvent droplets from falling on said wafer.
A method for drying a wafer in a solvent dryer comprising the steps of:
- providing a solvent dryer equipped with:
- a body having a cavity for holding a wafer therein,
- a means for introducing a solvent vapor in said cavity, and
- a plurality of condensing plates affixed to said plurality of condenser coils on a surface facing said wafer;
- flowing a coolant of not higher than 20° C. through said plurality of condenser coils;
- positioning a wafer having water molecules on its surface in said cavity;
- introducing a solvent vapor in said cavity and drying said wafer;
- and
- condensing solvent vapor that contains water molecules on surfaces of said plurality of condensing plates and collecting in a reservoir.
Dependencies are inferred from the claim text.