Method and structure for measuring bridge induced by mask layout amendment
AssigneeUnited Microelectronics Corp.
InventorCheng-Nan Lin
Life of this patent
Estimating the term…
Abstract
A method for measuring bridge induced by mask layout amendment. Provide a mask with a layout that comprises a conductor line pattern, numerous gate patterns which are connected with conductor line pattern, and numerous contact pattern groups, each contact pattern group has numerous contact patterns and at least surrounds one terminal, which does not contact with conductor line, of one corresponding gate pattern. Then, amend this layout and transfer amended layout into a substrate to form a conductor line, numerous gates and numerous contact groups in and on this substrate. Finally, electrically couple these contact groups with a terminal, then, apply an electrical signal into this conductor line and measure whether the electrical signal appears at this terminal.
Claims6
A method for measuring bridge induced by mask layout amendment, comprising:
- providing a mask, said mask having a layout which comprises:
- a conductor line pattern;
- a plurality of gate patterns, each said gate pattern being separated with other said gate patterns, gate patterns being connected with said conductor line pattern;
- and
- a plurality of contact pattern groups, each said contact pattern group being separated with other said contact pattern groups and being corresponding to one said gate pattern, each said contact pattern group at least having a plurality of contact patterns which at least surrounds one terminal of said corresponding gate pattern and which do not contact with said conductor line;
- amending said layout;
- transferring amended said layout into a substrate, so that a conductor line, a plurality of gates and a plurality of contact groups are formed in and on said substrate;
- electrically coupling said contact groups with a terminal;
- and
- applying an electrical signal into said conductor line and measuring whether said electrical signal appears at said terminal.
Dependencies are inferred from the claim text.