Process method of using excimer laser for forming micro spherical and non-spherical polymeric structure array

A method of using an excimer laser for forming a polymeric structure array, which comprises the steps of:

• a) coating a surface of a substrate with a polymeric material;
• b) providing an excimer laser;
• c) providing at least one photomask between the excimer laser and the substrate, the photomask having a transparent zone oriented in a straight line, a width of the transparent zone continuously varying along the straight line;
• d) projecting a first excimer laser beam through the transparent zone of the photomask onto the polymeric material on the substrate while simultaneously moving the substrate in a first direction perpendicular to the straight line of the transparent zone to form an etched first three dimensional pattern in the polymeric material;
• and
• e) projecting a second excimer laser beam through the transparent zone of the photomask onto the first three dimensional pattern on the substrate while simultaneously moving the substrate in a second direction, different than the first direction, to form an etched second three dimensional pattern in the polymeric material.