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US 6,656,592 B2Granted
Carbon film and method of forming the same
AssigneeNissin Electric Co., Ltd.
InventorsKoji Miyake, Yasuo Murakami, Jo Takeuchi, Takahiro Nakahigashi, Kiyoshi Ogata
Life of this patent
Estimating the term…
Abstract
A carbon film C containing carbon as a main component, formed on the surface of a soft base material 4, characterized in that the film C is cracked A and divided into a plurality of regions B, and an average area of respective regions (blocks) surrounded by cracks A is 0.15×10−3 mm2 to 20×10−3 mm2.
Claims5
A carbon film containing carbon as a main component, formed on a surface of a soft base material, wherein the film is cracked and divided into a plurality of regions, and an average area of respective regions surrounded by cracks is 0.15×10−3 mm2 to 20×10−3 mm2.
Dependencies are inferred from the claim text.