Coating installation for disk-form workpieces
AssigneeUnaxis Balzers Aktiengesellschaft
InventorThomas Matt
Life of this patent
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Abstract
A method for manufacturing a coated substrate disk, comprises linearly bringing the substrate on a mounting, into an evacuated transport chamber and rotating the mounting in the chamber. The mounting is then extended into a coating position and coating of the substrate takes place. The mounting is then linearly retracted into the chamber again and rotated into a position for guiding the substrate out of the chamber. These steps are repeated for several substrates and then a pump opening into the chamber is closed by means of the mounting or the substrate. The chamber is then flooded and vacuum-tightly closed and the pump opening is released. The chamber is evacuated and the substrate moving and coating steps are repeated for more substrates.
Claims14
A method for manufacturing a coated disk-shaped substrate, comprising the steps of:
- (a) providing an evacuated transport chamber;
- (b) accepting a substrate on a mounting and bringing the substrate linearly into the transport chamber;
- (c) rotating the mounting with the substrate about a predetermined angle in the transport chamber;
- (d) linearly extending the mounting with the substrate into a coating position;
- (e) coating the substrate in the coating position;
- (f) linearly retracting the mounting with the substrate into the transport chamber;
- (g) rotating the mounting and the substrate into a position to be moved and guided linearly out of the transport chamber;
- (h) moving the substrate out of the transport chamber;
- (i) subsequently repeating steps (a) to (h) a plurality of times;
- (k) closing a pump opening on the transport chamber by means of at least one of the mounting and the substrate on the mounting;
- (l) flooding the transport chamber;
- (m) again vacuum-tightly closing the transport chamber;
- (n) again releasing the pump opening;
- (o) evacuating the transport chamber;
- and
- (p) initiating steps (a) to (i) again.
Dependencies are inferred from the claim text.