Stage device and exposure apparatus, and method of manufacturing a device

A stage device comprising:

• a first stage that moves within a first region that includes a specified region;
• a second stage that moves within a second region that includes the specified region;
• a first reference member having a first movement reference surface located in the specified region, the first movement reference surface used as a reference surface by the first and second stages when the first and second stages are located in the specified region;
• at least one second reference member having a second movement reference surface located outside of the specified region, the second movement reference surface used as a reference surface by a specified stage, the specified stage being at least one stage of the first and second stages;
• and
• a switching device that switches between a first state in which the specified stage can move along the first movement reference surface in the specified region, and a second state in which the specified stage can move along the second movement reference surface outside of the specified region.

A stage device comprising:

• a first stage that moves within a first region that includes a specified region;
• a second stage that moves within a second region that includes the specified region;
• and
• a stage base having a first movement reference surface, a second movement reference surface and a third movement reference surface mounted thereon, the first movement reference surface is used as a reference when the first and second stages move within the specified region, and the second and third movement reference surfaces are positioned on opposite sides of the first movement reference surface, the second and third reference surfaces are used as references when the first and second stages move outside of the specified region;
• wherein a surface accuracy of the second and third movement reference surfaces is rougher than a surface accuracy of the first movement reference surface.

A method of moving an object held by a stage, the method comprising:

• providing a first reference member having a first movement reference surface that movably supports the movable stage and is used as a reference when the stage moves the object in a specified region;
• providing a second reference member having a second movement reference surface, different from the first movement reference surface;
• and
• switching between a first state in which the stage can move along the first movement reference surface, and a second state in which the stage can move along the second movement reference surface.

A stage device comprising:

• a movable stage for holding an object;
• first reference means for movably supporting the movable stage and acting as a reference when the movable stage moves;
• second reference means, different from the first reference means, for movably supporting the movable stage and acting as a reference when the movable stage moves over the second reference means;
• first moving means for moving the movable stage over the first reference means;
• second moving means for moving the movable stage over the second reference means;
• and
• switching means for switching between a first state in which the movable stage moves along the first reference means, and a second state in which the movable stage moves along the second reference means.

A stage device comprising:

• a first stage that moves within a first region that includes a specified region;
• a second stage that moves within a second region that includes the specified region;
• first reference means located in the specified region, the first reference means for movably supporting the first and second stages and acting as a reference when the first and second stages are located in the specified region;
• second reference means located outside of the specified region, the second reference means acting as a reference and for supporting a specified stage, the specified stage being at least one stage of the first and second stages;
• first moving means for moving the specified stage over the first reference means;
• second moving means for moving the specified stage over the second reference means;
• and
• switching means for switching between a first state in which the specified stage moves along the first reference means in the specified region, and a second state in which the specified stage moves along the second reference means outside of the specified region.