Piezoelectric actuated jet impingement cooling

A method for thermal management of one or more heat producing components comprising:

• determining the temperature of the heat producing component with one or more temperature sensor in thermal contact with one or more areas of the heat producing component, the sensors adapted to provide a voltage in relationship to the temperature;
• controlling the volume of fluid expelled from piezoelectric orifices located on a bottom of a reservoir onto the heat producing component, the piezoelectric orifices opened by the voltage provided by the temperature sensor;
• collecting the expelled fluid;
• and
• pumping the expelled fluid into the reservoir.

A microelectronic assembly comprising:

• a microelectronic die;
• a reservoir having a bottom;
• at least one piezoelectric orifice located in the bottom, the piezoelectric orifice adapted to control the flow of fluid held from within the reservoir onto the microelectronic die;
• and
• at least one temperature sensor adapted to provide a voltage corresponding to temperature to one or more piezoelectric orifices, the piezoelectric orifices adapted to open a predetermined amount when provided with a predetermined voltage.