Apparatus for depositing thin film
AssigneeLG Electronics Inc.
InventorChang Nam Kim
Life of this patent
Estimating the term…
Abstract
Disclosed is a thin film deposition apparatus for depositing a thin film on a display panel including a deposition source having a groove in one surface wherein the groove is filed with a thin film material to be deposited on the panel, a heater applying heat to the deposition source so as to sublimate the thin film material, and a mask loaded on the deposition source so as to cover the groove of the deposition source, the mask having a plurality of holes to adjust a deposition quantity of the thin film material deposited on the panel.
Claims27
In a thin film deposition apparatus for depositing a thin film on a display panel, an apparatus for depositing the thin film, comprising:
- a deposition source having a groove in one surface wherein the groove is filed with a thin film material to be deposited on the panel;
- a heater applying heat to the deposition source so as to sublimate the thin film material;
- and
- a mask loaded on the deposition source so as to cover the groove of the deposition source, the mask having a plurality of holes to adjust a deposition quantity of the thin film material deposited on the panel.
In a thin film deposition apparatus for depositing a thin film on a display panel, an apparatus for depositing the thin film, comprising:
- a deposition source having a groove in one surface wherein the groove is filed with a thin film material to be deposited on the panel;
- a first heater applying heat to the deposition source so as to sublimate the thin film material;
- a mask loaded on the deposition source so as to cover the groove of the deposition source, the mask having a plurality of holes to adjust a deposition quantity of the thin film material deposited on the panel;
- and
- a second heater applying heat to the mask so that the sublimated thin film material fails to adhere to the mask.
In a thin film deposition apparatus for depositing a thin film on a display panel, an apparatus for depositing the thin film, comprising:
- a deposition source having a groove in one surface wherein the groove is filed with a thin film material to be deposited on the panel;
- and
- a mask heater loaded on the deposition source so as to cover the groove of the deposition source, the mask heater having a plurality of holes to adjust a deposition quantity of the thin film material deposited on the panel, the mask heater applying heat to the deposition source so as to sublimate the thin film material.
Dependencies are inferred from the claim text.