Semiconductor device with MIS capacitors sharing dielectric film
AssigneeSony Corporation
InventorTomotaka Fujisawa
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Abstract
A semiconductor device having an MIS capacitor having a low capacitance value and an MIS capacitor having a high capacitance value, and to a manufacturing method thereof. One MIS capacitor consists of a lower conductive material region formed on the substrate, a multilayer dielectric film consisting of a first insulating film, serving as both an interlayer insulating film and a dielectric film, and a second insulating film serving as a dielectric film of the other MIS capacitor, and an upper conductive material film, and the capacitance of the first MIS capacitor is determined by an area of the dielectric film formed by the second insulating film.
Claims5
A semiconductor device comprising:
- a first insulator capacitor formed on a substrate;
- and
- a second insulator capacitor formed on said substrate;
- and having a higher capacitance than a capacitance of said first insulator capacitor, characterized in that
- said first insulator capacitor is comprised of a first diffusion region serving as a lower electrode formed on said substrate, a first insulating film serving as both an interlayer insulating film and a dielectric film of the first insulator capacitor, and formed on said first diffusion region, a second insulating film serving as a part of the dielectric film of the first insulator capacitor and formed on said first insulating film, and a conductive material film formed on said second insulating film serving as an upper electrode;
- said second insulator capacitor is comprised of a second diffusion region serving as a lower electrode formed on said substrate, said second insulating film serving as a dielectric layer and formed on said second diffusion region, and a conductive material formed on said second insulating film serving as an upper electrode;
- and
- the capacitance of said first insulator capacitor is determined by a formation area of said dielectric film.
Dependencies are inferred from the claim text.