System and method for active control of spacer deposition

A precise measurement control system for regulating spacer deposition on a semiconductor device comprising at least a substrate, an oxide layer, a polysilicon layer, an anti-reflective layer, a patterned photoresist layer, a spacer layer and a plurality of gratings, the precise measurement control system comprising:

• a controller that controls a spacer deposition component to deposit a spacer on a portion of a wafer;
• a light source to project light onto the portion of the wafer;
• a light collecting device that collects at least reflected light from the spacer on the portion of the wafer, and utilizes the reflected light for measuring one or more spacer parameters associated with the deposited spacer;
• a memory that comprises a signal signature library and a standard set of parameters;
• a power supply for providing power to the precise measurement control system;
• and,
• a processor comprising at least one cpu operatively coupled to the light collecting device and the controller, wherein the processor comprising at least one cpu receives one or more spacer parameters, including thickness, coverage and uniformity, from the light collecting device, and the at least one cpu analyzes the parameters by comparing the parameters to stored acceptable spacer parameters, including thickness, coverage and uniformity, and provides instructions to a feedback control system based on the analyzed parameters to adjust the rate of spacer deposition on the portion of the wafer and on subsequent wafers.