Method of producing near-net shape free standing articles by chemical vapor deposition
AssigneeShipley Company, L.L.C.
InventorsJitendra Singh Goela, Zlatko Salihbegovic, Michael A. Pickering, Mitch Boudreaux
Life of this patent
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Abstract
Near net shape free standing articles can be produced by chemical vapor deposition techniques when a suitable substrate is suspended in a chemical vapor deposition zone according to the disclosed technique. By suspending such substrates from linear suspension supports such as ropes, cables and wires, multiple near net shape articles can be produced with substantial manufacturing cost savings over previously employed techniques.
Claims17
An apparatus for chemical vapor deposition comprising:
- a deposition box having multiple sides, a cover plate with at least one port for the ingress of reactants and an end plate with a port for the egress of the reactants, the deposition box comprises at least one linear suspension means for suspending a substrate in the box, the at least one linear suspension means has a first end associated with an at least one anchoring means of the box, a second end for engaging a substrate at an at least one engaging means on the substrate, the engaging means of the substrate comprises a hole or a slot, the at least one linear suspension means is sufficiently flexible such that the at least one linear suspension means may be twisted or flexed to release the substrate with a deposit.
A apparatus for chemical vapor deposition comprising:
- a deposition box having multiple sides, a cover plate with at least one port for the ingress of reactants, and an end plate with a port for the egress of reactants, at least one linear suspension means having a first end associated with a first anchoring means at one end of the deposition box and a second end associated with a second anchoring means at an opposite end of the deposition box, the linear suspension means suspends a substrate to be coated in the deposition box the substrate has an engaging means comprising holes or slots for the linear suspension means to suspend the substrate in the deposition box, the at least one linear suspension means is sufficiently flexible such that the at least one linear suspension means may be twisted or flexed to release the substrate with a deposit.
A ring-shaped mandrel having an annular portion that is larger than the thickness of the ring-shaped mandrel comprising at least one protrusion engaging means that is coplanar with a surface of the ring-shaped mandrel and extends outwardly from an outer normal diameter of the mandrel surface away from a center of the mandrel, the protrusion engaging means provides a means for suspending the ring-shaped mandrel in a chemical vapor deposition chamber such that the ring-shaped mandrel does not contact a surface of the chemical vapor deposition chamber.
A ring-shaped mandrel having an annular portion that is larger than the thickness of the ring-shaped mandrel comprising at least one protrusion engaging means that is coplanar with a surface of the ring-shaped mandrel and extends from an inner normal diameter of the mandrel surface toward the center of the mandrel, the protrusion engaging means provides a means for suspending the ring-shaped mandrel in a chemical vapor deposition chamber, the protrusion engaging means is a tab comprising a hole or a slot.
Dependencies are inferred from the claim text.