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US 6,648,128 B2Granted
Conveyor, method for conveying a semiconductor wafer, and method for manufacturing a semiconductor device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsToshihiro Yamashita, Toshio Komemura, Toshihiko Noguchi
Life of this patent
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Abstract
A conveyor is provided that is capable of preventing degradation in quality of an article being conveyed. The conveyor includes a conveyor belt; and a rolling element rotatably provided at a surface of the conveyor belt. A plurality of rolling elements are provided along a conveying direction. The conveyor further includes a holder provided at the surface of the conveyor belt, for rotatably holding the corresponding rolling element. The rolling element has a ball shape.
Claims5
A conveyor, comprising:
- a conveyor belt having a continuous surface, portions thereof respectively disposed in an upper conveying level and a lower return level;
- a rolling element rotatably provided at the surface of the conveyor belt;
- a holder provided at the surface of the conveyor belt, for rotatably holding the rolling element;
- and
- a cleaning member disposed below the return level of the conveyor belt for contact with the rolling element, wherein the rolling element rolls on the cleaning member for cleaning the rolling element.
2 more elements
Dependencies are inferred from the claim text.