Sensor micro-machined with electrolytic welding and method for making same

Abstract

A sensor of physical quantities, such as a pressure sensor or an acceleration sensor, and more specifically to the mounting of the active part of the sensor on a base bearing connection pins. An active part of the sensor includes, for example, micro-machined silicon wafers bearing electronic elements, electrical conductors, and connection pads. A base is also prepared, provided with pins whose upper ends are spatially arranged, with each pin facing a respective connection pad. The face bearing the connection pads is applied to the upper part of the pins, and the unit is dipped into an electrolytic bath to deposit metal that rigidly solders the pins to the connection pads. Preferably, the conductive parts, pins, and connection pads of the unit are then covered with an insulator to prevent electrical leakage between pins subjected to different potentials.

Dependencies are inferred from the claim text.