Submicron dimensional calibration standards and methods of manufacture and use

A method for forming a calibration standard, comprising:

• forming at least one layer upon an upper surface of a first substrate;
• determining a thickness of the at least one layer using a traceable measurement technique;
• bonding a second substrate to an upper surface of the at least one layer;
• and
• cross-sectioning the first substrate, the at least one layer, and the second substrate in a plane substantially perpendicular to at least the upper surface of the first substrate to form a viewing surface of the calibration standard such that a lateral dimensional artifact of the calibration standard comprises the determined thickness of the at least one layer.

A method for calibrating a lateral dimensional measurement system, comprising:

• determining a thickness of at least one layer of a calibration standard with the system, wherein the calibration standard comprises:
• a first substrate spaced from a second substrate;
• and
• at least one layer disposed between the first and second substrates, wherein the at least one layer comprises a traceably measured thickness, wherein a viewing surface of the calibration standard comprises a cross-sectional surface of the calibration standard, and wherein the cross-sectional surface is substantially perpendicular to an upper surface of at least the first substrate such that a lateral dimensional artifact of the calibration standard comprises the traceably measured thickness of the at least one layer;
• and
• altering calibration factors of the measurement system if the determined lateral dimension is not substantially equal to the lateral dimensional artifact of the calibration standard.