Vertical bipolar transistor formed using CMOS processes
AssigneeTexas Instruments Incorporated
InventorAmitava Chatterjee
Life of this patent
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Abstract
A vertical bipolar transistor is described which utilizes ion implantation steps which are used to form an nMOS field effect device and a pMOS field effect device. The implantation steps form an n-well, a channel stop p-well region and emitter region which are vertically oriented within a semiconductor substrate. The resulting bipolar device is junction isolated from other circuits formed on the substrate by a p-well region.
Claims12
An integrated electronic device comprising a plurality of active electronic devices formed in a single semiconductor substrate doped with ions of a first conductivity type, comprising:
- a first field effect device comprising a gate stack structure disposed proximate the outer surface of the semiconductor substrate, the first field effect device comprising source and drain regions comprising ions of a first conductivity type, the source and drain regions disposed proximate opposing edges of the gate stack structure, the first field effect device disposed in a well region comprising ions of the second conductivity type, the well region disposed in the outer surface of the semiconductor layer;
- a second field effect device comprising source and drain regions comprising ions of the second conductivity type, the second field effect device comprising a second gate stack structure disposed on the outer surface of the semiconductor layer and disposed between the source and drain regions of the second field effect device, the second field effect device disposed in a well region comprising ions of the first conductivity type;
- and
- a bipolar device comprising a collector region comprising ions of the second conductivity type, the collector region and the well region of the first field effect device formed using a first common implant process, the bipolar device further comprising a base region comprising ions of the first conductivity type, the base region formed using an ion implant process which is also used to form the second field effect device, the bipolar device further comprising an emitter region comprising ions of the second conductivity type, the emitter region and the source and drain regions of the second field effect device formed using a second common ion implant process.
An integrated circuit device comprising a plurality of active electronic devices formed in a semiconductor substrate doped wit boron ions, having a top surface, comprising:
- a pMOS device comprising a source and drain regions, a gale stack structure, a n-well region, a first threshold voltage implant region, a first punch through implant region, and a first channel stop implant region, disposed near the top surface of the semiconductor substrate;
- a nMOS device comprising a source and drain regions, a gate stack structure, a p-well region, a second threshold voltage implant region, a second punch through implant region, and a second channel stop implant region, disposed near the top surface of the semiconductor substrate;
- an npn-bipolar device comprising a collector region, a collector contact region, a base region, a base contact region, and a emitter region;
- an insulation region between the emitter region and the base collector region, distant from the base-collector junction;
- an insulation region between the emitter region and the collector contact region;
- the collector region having substantially the same n-type dopant profile as the n-well dopant profile;
- the base region having substantially the same p-type dopant profile as the first channel stop implant region dopant profile;
- and
- the emitter region having substantially the same n-type dopant profile as the nMOS source and drain region dopant profile.
An integrated circuit device comprising a plurality of active electronic devices formed in a semiconductor substrate doped with boron ions, having a top surface, comprising:
- a pMOS device comprising a source and drain regions, a gate stack structure, a n-well region, a first threshold voltage implant region, a first punch through implant region, and a first channel stop implant region, disposed near the top surface of the semiconductor substrate;
- a nMOS device comprising a source and drain regions, a gate stack structure, a p-well region, a second threshold voltage implant region, a second punch through implant region, and a second channel stop implant region, disposed near the top surface of the semiconductor substrate;
- a npn-bipolar device comprising a collector region, a collector contact region, a base region, a base contact region, and a emitter region;
- a sacrificial gate stack structure disposed near the top surface, electrically isolating the base contact region and the emitter region;
- an insulation region between the emitter region and the collector contact region;
- the collector region having substantially the same n-type dopant profile as the n-well dopant profile;
- the base region having substantially the same p-type dopant profile as the first channel stop implant region dopant profile;
- and
- the emitter region having substantially the same n-type dopant profile as the nMOS source and drain region dopant profile.
Dependencies are inferred from the claim text.