Electrostatic discharge trigger
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorChung-Hui Chen
Life of this patent
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Abstract
Employing an electrostatic discharge (ESD) trigger to trigger the MOS transistors (i.e., the ESD fingers) within a CMOS device to provide substantially more uniform turn-on voltages for the MOS transistors, resulting in better ESD device performance without employing selective salicide blocking, is disclosed. A semiconductor device has an ESD trigger and a number of ESD fingers. The turn on voltage of the ESD trigger is less than the turn on voltage of the ESD fingers, such that the ESD fingers turn on substantially uniformly after the ESD trigger turns on during an ESD event. The semiconductor device is substantially fabricated without employing salicide blocking.
Claims15
A CMOS semiconductor device having salicide to lower sheet resistance of a polysilicon resistor, and of sources and drains of MOS transistors, of the CMOS semiconductor device, the CMOS semiconductor device further comprising:
- an electrostatic discharge (ESD) trigger having a first turn-on voltage;
- and,
- a plurality of ESD fingers having a second turn-on voltage greater than the first turn-on voltage such that the ESD fingers turn on substantially uniformly after the ESD trigger turns on during an ESD event,
- the semiconductor device substantially fabricated without employing salicide blocking.
A CMOS semiconductor electrostatic discharge (ESD) protection device having salicide to lower sheet resistance of a polysilicon resistor, and of sources and drains of MOS transistors, of the CMOS semiconductor ESD protection device, the CMOS semiconductor ESD protection device further comprising:
- an ESD trigger having a first turn-on voltage and a first channel length;
- and,
- a plurality of ESD fingers having a second turn-on voltage greater than the first turn-on voltage, and a second channel length greater than the first channel length, such that the ESD fingers turn on substantially uniformly after the ESD trigger turns on during an ESD event,
- the semiconductor device substantially fabricated without employing salicide blocking.
A CMOS semiconductor driver device having salicide to lower sheet resistance of a polysilicon resistor, and of sources and drains of MOS transistors, of the CMOS semiconductor device, the CMOS semiconductor driver device having electrostatic discharge (ESD) protection and further comprising:
- an ESD trigger having a first turn-on voltage and a first channel length;
- and,
- a plurality of ESD fingers having a second turn-on voltage greater than the first turn-on voltage, and a second channel length greater than the first channel length, such that the ESD fingers turn on substantially uniformly after the ESD trigger turns on during an ESD event,
- the semiconductor device substantially fabricated without employing salicide blocking.
Dependencies are inferred from the claim text.