US 6,646,235 B2 · Multi-zone resistive heater

Abstract

A heating apparatus including a stage comprising a surface having an area to support a wafer and a body, a shaft coupled to the stage, and a first and a second heating element. The first heating element is disposed within a first plane of the body of the stage. The second heating element is disposed within a second plane of the body of the stage at a greater distance from the surface of the stage than the first heating element. A reactor comprising a chamber, a resistive heater, a first temperature sensor, and a second temperature sensor. A resistive heating system for a chemical vapor deposition apparatus comprising a resistive heater. A method of controlling the temperature in a reactor comprising providing a resistive heater in a chamber of a reactor, measuring the temperature with at least two temperature sensors, and controlling the temperature in the reactor by regulating a power supply to the first heating element and the second heating element according to the temperature measured by the first temperature sensor and the second temperature sensor.

Claims4

Dependent claims

A system comprising:

a chamber configured to house a substrate for processing;
a resistive heater comprising a stage disposed within the chamber including a surface having an area to support a substrate and a body, a first heating element disposed within a first portion of the surface area of the stage and within a first plane of the body of the stage and adapted to apply a variable heat energy to an area of the surface of the stage, and a second heating element disposed within a second portion of the surface area of the stage and in a second plane of the body of the stage;
a power source configured to supply power to the first heating element and the second heating element;
a system controller coupled to the power source and configured to control the power source;
and
a memory coupled to the controller comprising a computer-readable medium having a computer-readable program embodiment therein for directing operation of the system, the computer-readable program comprising:
instructions for controlling the temperature at the stage by regulating the power supply to each of the first heating element and the second heating element.

4 more elements

Dependencies are inferred from the claim text.

Multi-zone resistive heater

Life of this patent

Multi-zone resistive heater

Life of this patent

Abstract

Claims4