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US 6,645,804 B1Granted
System for fabricating a metal/anti-reflective coating/insulator/metal (MAIM) capacitor
AssigneeTexas Instruments Incorporated
InventorsF. Scott Johnson, Luigi Columbo, Doug Prinslow, Kelly Taylor, Van-Joy Tsai
Life of this patent
Estimating the term…
Abstract
Disclosed is a system for fabricating an integrated circuit capacitor (100). An electrode layer (102) is formed in the integrated circuit. An anti-reflective coating (108) is deposited over the electrode layer (102). An electrode top plate (104) is formed over the anti-reflective coating (108).
Claims20
A method of fabricating an integrated circuit capacitor, comprising the steps of:
- forming an electrode layer having an upper surface;
- depositing an anti-reflective coating over and extending to the edges of the electrode layer;
- forming an electrode top plate over a portion of the anti-reflective coating while leaving a portion of the anti-reflective layer exposed;
- and
- then patterning a metal layer disposed over and spaced from the electrode top plate.
2 more elements
A method of fabricating an integrated circuit capacitor, comprising the steps of:
- depositing a first metallic layer having an upper surface;
- depositing an anti-reflective dielectric layer over and extending to the edges of the first metallic layer;
- depositing a second metallic layer over a portion of the anti-reflective dielectric layer while leaving a portion of the anti-reflective layer exposed;
- and
- then patterning a metal layer disposed over and spaced from the electrode top plate.
2 more elements
A method of fabricating a Metal-Insulator-Metal (MIM) capacitor, comprising the steps of:
- forming a metallic electrode having an upper surface;
- depositing an anti-reflective insulator over and extending to the edges of the metallic electrode;
- forming a metallic electrode top plate over a portion of the anti-reflective insulator while leaving a portion of the anti-reflective insulator exposed;
- and
- then patterning a metal layer disposed over and spaced from the electrode top plate.
2 more elements
Dependencies are inferred from the claim text.