Baths for producing microstructures
AssigneeClondiag Chip Technologies GmbH
InventorsEugen Ermantraut, Johann Michael Köhler, Torsten Schulz, Klaus Wohlfart
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Abstract
A bath for generating microstructures which is required in numerous fields of application of the microsystem technique and in microstructuring offers a less expensive alternative to known conventional approaches and disposal of the used bath may be carried out in a manner more environmentally friendly manner than in the previous methods for manufacture of microstructures. The bath includes at least one biogenic agent (in particular, an enzyme) which acts upon a preselectable thin layer.
Claims5
A bath for generating microstructures in a layer system, the layer system including at least two layers arranged in a particular layer sequence, said at least two layers including a first layer and a second layer, the bath comprising:
- a solution including at least two biogenic agents, said at least two biogenic agents including a first biogenic agent and a second biogenic agent each having an activity effective for degrading at least a respective one of said first and second layers, wherein said first and second biogenic agents are selected for activation at different temperatures, and wherein said solution is brought into contact with the layer system.
Dependencies are inferred from the claim text.