Process for producing a ceramic evaporation boat having an improved initial wetting performance
AssigneeWacker Chemie AG
InventorMartin Seifert
Life of this patent
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Abstract
A ceramic evaporation boat for the evaporation of metal comprising an electrically conductive component and an electrically non conductive component, wherein the electrically conductive component of the ceramic material is concentrated at the surface of the evaporation boat from which the evaporation of the metal occurs. The evaporation boats have an improved initial wetting performance.
Claims18
A process for producing an evaporation boat of ceramic material having a surface for evaporating metal consisting essentially of the following steps:
- providing an initial evaporation boat having an electrically conductive ceramic component and at least one electrically non-conductive ceramic component on the surface of said initial evaporation boat;
- and
- directing a laser beam on the surface of said initial evaporation boat to simultaneously evaporate said at least one electrically non-conductive ceramic component from the surface of said initial evaporation boat and melt said electrically conductive ceramic component on the surface of said initial evaporation boat to form a modified evaporation boat having a layer of said electrically conductive ceramic component that has a resistivity at room temperature of between 100 and 1500 μΩcm and a resistivity at operating temperature of between 300 and 4500 μΩcm.
A process for producing an evaporation boat of ceramic material having a surface for evaporation metal consisting essentially of the following steps:
- providing an initial evaporation boat having an electrically conductive ceramic component and at least one on electrically non-conductive ceramic component on the surface of said initial evaporation boat;
- providing an additional amount of electrically conductive ceramic component to the surface of said initial evaporation boat;
- and
- directing a laser beam on the surface of said initial evaporation boat to simultaneously evaporate said at least one electrically non-conductive ceramic component from the surface of said initial evaporation boat and melt said electrically conductive ceramic component on the surface of said initial evaporation boat to form a modified evaporation boat having a layer of said electrically conductive ceramic component that has a resistivity at room temperature of between 100 and 1500 μΩcm and a resistivity at operating temperature of between 300 and 4500 μΩcm.
A process for producing an evaporation boat of ceramic material having a surface for evaporating metal consisting essentially of the following steps:
- providing an initial evaporation boat having an electrically conductive ceramic component and at least one electrically non-conductive ceramic component on the surface of said initial evaporation boat;
- and
- directing a laser beam on the surface of said initial evaporation boat to simultaneously evaporate said at least one electrically non-conductive ceramic component from the surface of said initial evaporation boat and melt said electrically conductive ceramic component on the surface of said initial evaporation boat to form a modified evaporation boat.
A process for producing an evaporation boat of ceramic material having a surface for evaporating metal consisting essentially of the following steps:
- providing an initial evaporation boat having an electrically conductive ceramic component and at least one electrically non-conductive ceramic component;
- and
- directing a laser beam on a potion of the surface of said initial evaporation boat to simultaneously evaporate a portion of said at least one electrically non-conductive ceramic component from the surface of said initial evaporation boat and melt a portion of said electrically conductive ceramic component on the surface of said initial evaporation boat to form a layer on at least a portion of the surface that is enriched in electrically conductive ceramic component to form a modified evaporation boat so that said enriched layer of electrically conductive ceramic component has a resistivity at room temperature of between 100 and 1500 μΩcm and a resistivity at operating temperature of between 300 and 4500 μΩcm.
Dependencies are inferred from the claim text.