Susceptors for semiconductor-producing apparatuses
AssigneeNGK Insulators, Ltd.
InventorShinji Yamaguchi
Life of this patent
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Abstract
A susceptor made of a ceramic material for placing and heating an object to be processed, on a placing face thereof in a semiconductor-producing apparatus, includes a surface layer having the placing face, and a supporting layer integrated with the surface layer. The volume resistivity of the surface layer is lower than that of the supporting layer.
Claims15
A susceptor made of a ceramic material for placing and heating an object to be processed on a placing face thereof in a semiconductor-producing apparatus, comprising a surface layer having said placing face, a supporting layer integrated with said surface layer, said surface and supporting layers each comprising AlN, wherein a volume resistivity of the surface layer is lowered than that of the supporting layer, and a heat generating element positioned entirely within the supporting layer, wherein said susceptor has no electrostatically chucking function.
Dependencies are inferred from the claim text.