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US 6,642,601 B2Granted
Low current substantially silicide fuse for integrated circuits
AssigneeTexas Instruments Incorporated
InventorsAndrew Marshall, Douglas A. Prinslow
Life of this patent
Estimating the term…
Abstract
A fuse (50, 150, 200) with a low fusing current includes a first contact element (51, 151, 201) and a second contact element (51, 151, 201). A fusing element (53, 153, 203) is coupled between the first and second contact elements (51, 151, 201). At least a majority of the fusing element (53, 153, 203) comprises silicided material.
Claims22
A fuse, comprising:
- a first contact element;
- a second contact element;
- a fusing element coupled between the first and second contact elements;
- and
- a polysilicon layer extending across at least part of the first and second contact elements, the polysilicon layer in each of the first and second contact elements thinning in height in a direction of the fusing element;
- wherein the fusing element comprises substantially no polysilicon.
3 more elements
An integrated circuit, comprising:
- a circuit;
- a fuse site including a plurality of polysilicon fuses for use in connection with the circuit;
- and
- the polysilicon fuses each comprising:
- a polysilicon layer gradually tapering in height in a first contact area and in a second contact area in a direction of a fusing element;
- and
- the a fusing element having substantially no polysilicon.
4 more elements
A fuse for an integrated circuit, comprising:
- a polysilicon layer gradually tapering in height in a first contact area and in a second contact area in a direction of a fusing area;
- a layer of silicided polysilicon disposed outwardly of the polysilicon layer and extending across the first contact area, the second contact area, and the fusing area;
- a width gradually tapering in each of the first and second contact areas between an end of the tapering in height of the polysilicon layer and the fusing area;
- the fusing area consisting essentially of silicide polysilicon such that the fuse blows at a voltage of 2.5 volts or less.
1 more element
Dependencies are inferred from the claim text.