Single chip multiple range pressure transducer device
AssigneeKulite Semiconductor Products, Inc.
InventorAnthony D. Kurtz
Life of this patent
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Abstract
A single chip multiple range pressure transducer device including a wafer having a plurality of simultaneously formed thinned regions. The thinned regions are separated by a fixed portion, and each have a same minimum thickness. The thinned regions have at least one different planar dimension. A plurality of piezoresistive circuits are formed on the wafer. Each of the circuits is associated with and at least partially formed above one of the thinned regions. The thinned regions deflect a different amount upon application of a common pressure thereto, whereby, when excited each of the circuits provides an output indicative the common pressure over a different operating range when the associated thinned region deflects.
Claims14
A single chip multiple range pressure transducer device comprising:
- a wafer including a plurality of simultaneously formed thinned regions separated by a fixed portion, each of said thinned regions having a same minimum thickness but of at least one different planar dimension;
- and,
- a plurality of piezoresistive circuits formed on said wafer, each of said circuits being associated with and at least partially formed above one of said thinned regions;
- wherein, said thinned regions deflect a different amount upon application of a common pressure thereto, whereby, when excited each of said circuits provides an output indicative of said common pressure over a different operating range when said associated thinned region deflects.
A pressure transducer operable over a given pressure range, said transducer comprising:
- a wafer including a plurality of simultaneously formed thinned regions, each of said thinned regions defining an active area of said wafer and having a common minimum thickness;
- and,
- a plurality of piezoresistive circuits each including a plurality of piezoresistors coupled in a Wheatstone bridge configuration and being at least partially over each of said active areas, each of said pluralities of piezoresistors operable to measure a pressure applied to said wafer over a respectively associated range;
- wherein, said associated ranges collectively define said given pressure range.
Dependencies are inferred from the claim text.