Photosensitive polymer
AssigneeSamsung Electronics Co., Ltd.
InventorsSook Lee, Ki-young Kwon, Si-hyeung Lee, Kwang-sub Yoon, Hyun-woo Kim, Dong-won Jung, Sang-jun Choi, Sang-gyun Woo
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Abstract
A photosensitive polymer which maintains transparency even when exposed to a short-wavelength light source of 193 nm or below, exhibits improved adhesiveness to a substrate, improved contrast and improved resistance to dry etching. The photosensitive polymer includes a first monomer which is alicyclic hydrocarbon carboxylate having an acid-labile C6 to C20 tertiary alicyclic hydrocarbon group as a substituent, and a second monomer which is capable of free radical polymerization.
Claims21
A photosensitive polymer comprising:
- a first monomer which is alicyclic hydrocarbon carboxylate having an acid-labile C8 to C20 tertiary alicyclic hydrocarbon group as a substituent;
- and
- a second monomer which is capable of free radical polymerization.
A photosensitive polymer comprising:
- a first monomer which is alicyclic hydrocarbon carboxylate having an acid-labile C8 to C20 tertiary alicyclic hydrocarbon group as a substituent;
- a second monomer which is capable of free radical polymerization;
- and
- a third monomer having secondary cyclic alcohol bonded to its backbone.
A photosensitive polymer comprising:
- a first monomer which is alicyclic hydrocarbon carboxylate having an acid-labile C8 to C20 tertiary alicyclic hydrocarbon group as a substituent;
- a second monomer which is capable of free radical polymerization;
- and
- at least one third monomer selected from the group consisting of (meth)acrylic acid, (meth)acrylate having C1 to C12 aliphatic alcohol as a substituent, (meth)acrylate having an acid-labile group as a substituent, and (meth)acrylate having a dissolution inhibitor group as a substituent.
A photosensitive polymer comprising:
- a first monomer which is alicyclic hydrocarbon carboxylate having an acid-labile C8 to C20 tertiary alicyclic hydrocarbon group as a substituent;
- a second monomer which is capable of free radical polymerization;
- and
- at least one third monomer selected from the group consisting of norbornene, norbornene-ol, norbornene having C1 to C12 aliphatic alcohol as a substituent, norbornene carboxylic acid, norbornene dicarboxylic anhydride, norbornene carboxylate having C1 to C12 aliphatic alcohol as a substituent, norbornene carboxylate having a lactone group as a substituent, norbornene carboxylate having an acid-labile group as a substituent, and norbornene carboxylate having a dissolution inhibitor group as a substituent.
A photosensitive polymer comprising:
- a first monomer which is alicyclic hydrocarbon carboxylate having an acid-labile C8 to C20 tertiary alicyclic hydrocarbon group as a substituent;
- a second monomer which is capable of free radical polymerization;
- and
- two or more monomers selected from the group consisting of a third monomer, a fourth monomer and a fifth monomer,
- wherein the third monomer is a monomer having a secondary cyclic alcohol group bonded to its backbone;
- wherein the fourth monomer is a monomer selected from the group consisting of (meth)acrylic acid, (meth)acrylate having C1 to C12 aliphatic alcohol as a substituent, (meth)acrylate having an acid-labile group as a substituent, and (meth)acrylate having a dissolution inhibitor group as a substituent;
- and
- wherein the fifth monomer is a monomer selected from the group consisting of norbornene, norbornene-ol, norbornene having C1 to C12 aliphatic alcohol as a substituent, norbornene carboxylic acid, norbornene dicarboxylic anhydride, norbornene carboxylate having C1 to C12 aliphatic alcohol as a substituent, norbornene carboxylate having a lactone group as a substituent, norbornene carboxylate having an acid-labile group as a substituent, and norbornene carboxylate having a dissolution inhibitor group as a substituent.
Dependencies are inferred from the claim text.