Dual loading port semiconductor processing equipment
AssigneeHitachi Kokusai Electric Inc.
InventorsTakanobu Nakashima, Tatsuhisa Matsunaga, Hidehiro Yanagawa
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Abstract
A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing substrates therein. Each pod door openers having means for permitting access to the substrates inside the pod placed on a corresponding pod supporting stage.
Claims9
A substrate processing equipment comprising:
- at least two pod supporting stages, each for placing thereon a pod for containing substrates therein, the pod having a door;
- at least two pod doors opening mechanisms, each for permitting access to substrates inside the pod placed on a corresponding one of the pod supporting stages;
- and
- wherein each of the pod door opening mechanisms horizontally removes the door from the corresponding pod to thereby allow substrates disposed inside of the corresponding pod to be unloaded therefrom.
A substrate processing equipment comprising:
- at least one pod door opening mechanism for permitting access to substrates disposed inside a pod having a door;
- wherein the pod door opening mechanism moves the door of the pod horizontally from a position where the door of the pod is closed to a retreated position where the pod is completely open thereby allowing substrates to be unloaded from the pod.
A substrate processing equipment comprising:
- a pod supporting stage for placing thereon a pod for containing substrates therein, the pod having an opening;
- a mapping apparatus mounted on the pod supporting stage for detecting the locations of substrates in the pod placed on the pod supporting stage through the opening of the pod;
- a substrate handling apparatus for unloading substrates from the pod placed on the pod supporting stage through the opening of the pod;
- and
- wherein the mapping apparatus pivotally moves between a mapping position at which a mapping process is carried out and a standby position located away from the opening of the pod to allow a substrates unloading process to be carried out through the opening.
A substrate processing method for use in a substrate processing equipment including at least two pod supporting stages, each for placing thereon a pod for containing substrates therein, the pod having a door, the method comprising the steps of:
- (a) placing a first pod on one pod supporting stage;
- (b) opening a door of the first pod only in substantially horizontal directions;
- (c) loading or unloading substrates to or from the first pod;
- and
- (d) placing a second pod on another pod supporting stage during the loading or unloading step (c).
Dependencies are inferred from the claim text.