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US 6,641,349 B1Granted
Clean box, clean transfer method and system
AssigneeTDK Corporation
InventorsToshihiko Miyajima, Tsutomu Okabe
Life of this patent
Estimating the term…
Abstract
A clean box is composed of a box body having an opening in one surface thereof and a lid member for closing the opening. An annular groove is formed so as to surround the opening on one of the box body or the lid member for defining a suction space sealed between the lid member and the box body under the condition that the lid member is mounted on the box body. Furthermore, intake/exhaust ports are provided for vacuum exhaust/release from the outside.
Claims20
A clean box comprising:
- a box body having an opening in a bottom;
- a lid member for closing said opening;
- a substantially vacuum-tight annular groove formed so as to surround said opening on at least one of said box body and said lid member, said substantially vacuum-tight annular groove being configured to form a substantially vacuum-tight suction space sealed by said lid member and said box body when said lid member is mounted on said box body;
- and
- an intake/exhaust port for allowing vacuum exhaust/release of said substantially vacuum-tight annular groove.
2 more elements
A clean transfer system comprising:
- a clean box including a box body having an opening in a bottom, a lid member for closing said opening, a substantially vacuum-tight annular groove formed so as to surround said opening on at least one of said box body and said lid member, said substantially vacuum-tight annular groove being configured to form a substantially vacuum-tight suction space sealed by said lid member and said box body when said lid member is mounted on said box body, and an intake/exhaust port for allowing vacuum exhaust/release of said substantially vacuum-tight annular groove;
- and
- a load port of a clean device whose interior is kept under a clean environment and having a box lid opening/closing mechanism for opening/closing the lid member of the clean box;
- wherein:
- said clean box is disposed so that said lid member and the box lid opening/closing mechanism on a side of the load port are aligned to confront with each other;
- and
- said load port has a device for vacuum exhausting/releasing said substantially vacuum-tight suction space through said intake/exhaust port of the clean box.
4 more elements
A clean box comprising:
- a box body having an opening in one surface thereof;
- a lid member for closing said opening;
- a substantially vacuum-tight annular groove formed so as to surround said opening on at least one of said box body and said lid member, said substantially vacuum-tight annular groove being configured to form a substantially vacuum-tight suction space sealed by said lid member and said box body when said lid member is mounted on said box body;
- and
- an intake/exhaust port for allowing vacuum exhaust/release of said substantially vacuum-tight annular groove, said intake/exhaust port being formed on said lid member.
2 more elements
A clean transfer system comprising:
- a clean box including a box body having an opening in one surface thereof, a lid member for closing said opening;
- an annular groove formed so as to surround said opening on at least one of said box body and said lid member to define a suction space sealed between said lid member and said box body when said lid member is mounted on said box body, and an intake/exhaust port for allowing vacuum exhaust/release of said annular groove said intake/exhaust port formed on said lid member;
- and
- a load port of a clean device whose interior is kept under a clean environment and having a box lid opening/closing mechanism for opening/closing the lid member of the clean box;
- wherein:
- said clean box is disposed so that said lid member and the box lid opening/closing mechanism on a side of the load port are aligned to confront with each other;
- and
- said box lid opening/closing mechanism of the load port releases the vacuum of the suction space through said intake/exhaust port formed on said lid member of the clean box, opens said lid member, and picks up an article to be transferred in the interior of the clean box.
5 more elements
Dependencies are inferred from the claim text.